Custom Sample Al-Cu-C-Mn-Au-CDMS

This custom sample was made for a customer who is used to execute SEM system maintenance and calibration (EDS and image magnification) on a 1” sample, this ½”sample is a smaller version.

  • The Cu aperture is used for EDS calibration (on the edge with the Al).
  • The Au and C are used to measure EDS count rate.
  • The Mn is used to measure EDS resolution (Mn Kα @5.898keV).
  • The CDMS chip is used to check and set the magnification calibration.

The CDMS chip is embedded in the sample so that the surface is just below the Al pin stub surface, this makes it les prone to damage from handling, or even accidental dropping of the sample.

Besides the use for calibration after service or maintenance of the SEM, this can also be used for routinely checking of alignments and calibration.

Customization of sample is not only possible with dedicated elements and compounds, but also with critical dimension standards, Sn balls or other components needed in the sample.

  • Product number: CAL_STUB_30
  • Price per unit: on request
Calibration Sample 30_Optical
BSD image_Stub 30